POLYCRYSTALLINE DIAMOND PRESSURE SENSOR

The piezoresistance and other characteristics of boron doped polycryst alline diamond films (PDF's) mere determined by analyzing free-standin g films that had been formed on silicon. These structures were adhered to a dielectric substrate, and from bending stresses a gauge factor w as estimated. Subsequently, a monolithic all-diamond pressure sensor w as designed and fabricated, whereby doped diamond resistors reside on a dielectric diamond substrate diaphragm, The process and piezoresista nce behavior of their structure is described [87].