FLEXIBLE, DRY-RELEASED PROCESS FOR ALUMINUM ELECTROSTATIC ACTUATORS (VOL 3, PG 90, 1994)

Authors
STORMENT CW BORKHOLDER DA WESTERLIND V SUH JW MALUF NI KOVACS GTA
Citation
Cw. Storment et al., FLEXIBLE, DRY-RELEASED PROCESS FOR ALUMINUM ELECTROSTATIC ACTUATORS (VOL 3, PG 90, 1994), Journal of microelectromechanical systems, 4(1), 1995, pp. 60-60
Citations number
1
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Journal of microelectromechanical systems → ACNP
ISSN journal
10577157
Volume
4
Issue
1
Year of publication
1995
Pages
60 - 60
Database
ISI
SICI code
1057-7157(1995)4:1<60:FDPFAE>2.0.ZU;2-P