MICROANALYSES OF TANTALUM OXIDE-FILMS ON SI SUBSTRATE DEPOSITED BY DYNAMIC ION-BEAM MIXING

Authors
HUANG NK WANG DZ
Citation
Nk. Huang et Dz. Wang, MICROANALYSES OF TANTALUM OXIDE-FILMS ON SI SUBSTRATE DEPOSITED BY DYNAMIC ION-BEAM MIXING, Physica status solidi. a, Applied research, 147(2), 1995, pp. 83-85
Citations number
2
Categorie Soggetti
Physics, Condensed Matter
Journal title
Physica status solidi. a, Applied research → ACNP
ISSN journal
00318965
Volume
147
Issue
2
Year of publication
1995
Pages
83 - 85
Database
ISI
SICI code
0031-8965(1995)147:2<83:MOTOOS>2.0.ZU;2-R