REGIONAL OBSERVABILITY OF A THERMAL-PROCESS

Authors
JAI AE ZERRIK E SIMON MC AMOUROUX M
Citation
Ae. Jai et al., REGIONAL OBSERVABILITY OF A THERMAL-PROCESS, IEEE transactions on automatic control, 40(3), 1995, pp. 518-521
Citations number
9
Categorie Soggetti
Controlo Theory & Cybernetics","Robotics & Automatic Control","Engineering, Eletrical & Electronic
Journal title
IEEE transactions on automatic control → ACNP
ISSN journal
00189286
Volume
40
Issue
3
Year of publication
1995
Pages
518 - 521
Database
ISI
SICI code
0018-9286(1995)40:3<518:ROOAT>2.0.ZU;2-8
Abstract
The realization of a ceramic protector covering a subregion of a subst rate and using chemical vapor deposition (cvd) techniques needs the te mperature field in the deposition zone to be controlled. A feedback co ntrol of this temperature is based on the knowledge of the temperature in the considered subregion. The difficulty occurs because measuremen ts can only be obtained out of the deposition zone. The purpose of thi s paper is to give an original approach for the reconstruction of the state in the deposition subregion.