SYNTHESIS OF BINARY COMPOUNDS ON A SOLID-SURFACE BY PHOTOACTIVATION OF THE ADATOMS OF COMPONENTS AS DEMONSTRATED WITH ALN

Authors
ZHILYAKOV LA KOSTANOVSKII AV KIRILLIN AV
Citation
La. Zhilyakov et al., SYNTHESIS OF BINARY COMPOUNDS ON A SOLID-SURFACE BY PHOTOACTIVATION OF THE ADATOMS OF COMPONENTS AS DEMONSTRATED WITH ALN, High temperature, 33(1), 1995, pp. 30-35
Citations number
19
Categorie Soggetti
Physics, Applied
Journal title
High temperature → ACNP
ISSN journal
0018151X
Volume
33
Issue
1
Year of publication
1995
Pages
30 - 35
Database
ISI
SICI code
0018-151X(1995)33:1<30:SOBCOA>2.0.ZU;2-0
Abstract
The mechanism of formation of binary compounds on a solid surface has been discussed and proposed on the basis of an analysis of the process of formation of thin films of aluminum nitride during reactive vapori zation of its condensed phase in a nitrogen atmosphere. The role of ph otoactivation of the adatoms of components (adsorbed atoms of aluminum during synthesis of films of aluminum nitride) has been demonstrated. The requirements are formulated to be met by the energy parameters of activating radiation for the synthesis reaction