TRACKING AND DYNAMIC CONTROL OF THE ANGULAR ALIGNMENT POSITION IN A PHOTOLITHOGRAPHIC MASK ALIGNER BY THE MOIRE INTERFERENCE TECHNIQUE

Authors
SINGH BP GOTO T SHARMA R KANJILAL AK NARAIN R CHITNIS VT LIU J UCHIDA Y
Citation
Bp. Singh et al., TRACKING AND DYNAMIC CONTROL OF THE ANGULAR ALIGNMENT POSITION IN A PHOTOLITHOGRAPHIC MASK ALIGNER BY THE MOIRE INTERFERENCE TECHNIQUE, Review of scientific instruments, 66(3), 1995, pp. 2658-2660
Citations number
7
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
Journal title
Review of scientific instruments → ACNP
ISSN journal
00346748
Volume
66
Issue
3
Year of publication
1995
Pages
2658 - 2660
Database
ISI
SICI code
0034-6748(1995)66:3<2658:TADCOT>2.0.ZU;2-Y