MONOCRYSTALLINE INP SURFACES NORMALLY SPUTTERED WITH AR- SEM AND TEM OBSERVATIONS( )

We report new findings on surface structures produced on monocrystalli ne InP after 3 keV normally incident Ar+ bombardment. As confirmed by transmission electron microscopy, In crystallites are observed to grow preferably in the peripheral region of the bombarded area and give ri se to densely populated nanometric size ''granules''. The peripheral r egion of the sputtered area exhibits a ring shape halo of white contra st in the SEM image. On the other hand, the central region of the bomb arded spot was characterized by sporadically produced cones. At those cone tips, the growth of small In particles was definitely observed, s uggesting the enhanced surface migration of In atoms at the cone tips. Such a promoted surface diffusion of In atoms was believed to be driv en by the surface temperature rise during ion bombardment.