THE PROPERTY AND STRUCTURAL-CHANGES OF DIAMOND-LIKE CARBON-FILMS AFTER IRRADIATION WITH 110 KEV FE+ IONS

Diamond-like carbon film, prepared by the dual-ion beam sputtering met hod, was irradiated by 110 keV Fe+ ions up to a fluence of 1 x 10(17) ions/cm(2). The infra-red absorption spectrum, the electrical resistiv ity of the film, Raman spectrum, Auger electronic spectroscopy and ref lection electron energy loss spectroscopy were used to characterize th e film before and/or after the irradiation. It was shown that the 110 keV Fe+ ion irradiation led to the breaking of C-H bonds and, conseque ntly, the decrease of sp(3) C-H and sp(2) C-H bonds. The irradiation a lso led to the decrease of the bond-angle disorder and the growth in s ize and/or number of sp(2) bond dominated crystallites in the film. Mo re serious damage was introduced in the near surface region of the fil m and thus more graphite-like structure was formed in this region. Bec ause of these structural changes, the electrical and the optical prope rties of the film were degraded after the irradiation. It was conclude d that the irradiation effect of 110 keV Fe+ on diamond-like carbon fi lm is nearly the same as that of 114 keV C+ and 1.5 MeV H+.