J. Nunes et S. Cherekdjian, REDUCTION OF MEASUREMENT SYSTEM VARIATION USING THE DISCRIMINATION RATIO, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 96(1-2), 1995, pp. 118-122
The standard deviation of Test-Retest error provides an absolute measu
re of the error introduced by the measurement system. It does not, how
ever, characterize the relative usefulness of the measurement system f
or measuring a specific product. Such a measure is of particular inter
est in a production environment. To determine the relative usefulness
of a measurement system, one must have an estimate of product variatio
n and a method for comparing Test-Retest error with product variation.
In this paper we will discuss the use of the Discrimination Ratio to
characterize and evaluate the relative usefulness of a given measureme
nt system in a production environment. In particular, we will calculat
e the Discrimination Ratio for a 4-point probe system and investigate
the effect of probe head tip radii on the overall system variation. Re
sults indicate that each implant recipe has an optimum four point prob
e head as determined by the maximization of the Discrimination Ratio.
Other four point probe heads could be used if larger system variations
are tolerated. The Discrimination Ratio was found to be a critical pa
rameter when interpreting results to minimize measurement system varia
tions.