L. Laanab et al., VARIATION OF END-OF-RANGE DENSITY WITH ION-BEAM ENERGY AND THE PREDICTIONS OF THE EXCESS INTERSTITIALS MODEL, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 96(1-2), 1995, pp. 236-240
The reduction of EOR (end-of-range) defect density seen after annealin
g for thinner amorphous layers created by ion implantation can be hard
ly explained by the motion of dislocation loops toward the surface. In
fact, the thickness of the amorphous layer is the result of the reduc
tion of the ion beam energy. The observed behaviour can be simply expl
ained through collisional arguments, i.e., when the beam energy is low
ered, the number of self-interstitials left beneath the c/a interface
which survive total recombination with the vacancies and will cluster
to form EOR decreases. There is a minimum threshold under which the su
persaturation of interstitials is too low to promote clustering on (11
1) planes, i.e., formation of EOR defects.