LARGE-SCALE IMPLANTATION AND DEPOSITION RESEARCH AT LOS-ALAMOS-NATIONAL-LABORATORY

This paper provides a review of research performed at two novel, large -scale ion implantation and deposition facilities developed within the High Energy-Density Physics Group at Los Alamos National Laboratory: the Plasma Source Ion Implantation (PSII) facility, where large-area ( several m(2)) workpieces are being implanted with nitrogen and carbon for tribological applications using a 100 kV, 60 A pulse modulator, an d the High Intensity Pulsed Ion Beam (HIPIB) facility, where high-temp erature superconductor and diamond-like carbon films are being deposit ed from substrate material evaporated with a 300 keV, 30 kA ion beam c apable of energy fluences of 30 kJ/cm(2) per pulse over an area of 25 cm(2)