Several millimeter-wave passive components have been fabricated using
the microshield transmission line geometry, and their performance is p
resented herein, Microshield is a quasi-planar, half-shielded design w
hich uses a thin dielectric membrane (1.5 mu m) to support the conduct
ing lines, This approach provides a nearly homogeneous, air-filled env
ironment and thus allows extremely broad-band TEM operation, This pape
r examines the conductor loss and effective dielectric constant of mic
roshield lines and presents results on transitions to conventional cop
lanar waveguide, right-angle bends, different stub configurations, and
lowpass and bandpass filters, Experimental data is provided along wit
h numerical results derived from an integral equation method, The micr
oshield line is shown to be very suitable for high performance millime
ter- and submillimeter-wave applications.