A GENERAL PROTOCOL FOR THE RECONSTRUCTION OF 3D ATOM-PROBE DATA

Data collected with 3D atom probes have to be carefully analysed in or der to give reliable composition data precisely positioned in the prob ed volume. Indeed, the large analysed surfaces of 3D atom probes requi re the development of reconstruction methods taking into account the t ip geometry. When the analysis does not take place in the close vicini ty of the tip axis, the analysis direction is no longer perpendicular to the evaporated surface. The influence of this effect on the local m agnification and atom positioning must be taken into account. The prop osed procedure will be validated by studying the effects of calculatio ns on a long-range-ordered phase.