SiC thin films on Si(111) were grown using solid state evaporation at
relatively low temperatures, Growth rates of 3-10 nm min(-1) have been
achieved at 750-900 degrees C. Results obtained from IR spectroscopy,
Auger electron spectroscopy and X-ray diffraction indicate good cryst
alline growth at T > 800 degrees C in the case of a stoichiometric com
position. The crystallinity was found to be deteriorated in layers wit
h excess Si or C. In addition, shifts in the IR absorption peak indica
te that the non-stoichiometric layers were highly stressed. Annealing
of non-stoichiometric layers shifts the peak to the position obtained
for stoichiometric layers.