MICROSTRUCTURAL MODIFICATIONS IN DIAMOND-LIKE CARBON THIN-FILMS CAUSED BY HIGH-ENERGY ION IRRADIATION

Authors
BARSHILIA HC SAH S MEHTA BR VANKAR VD AVASTHI DK",JAIPAL,"MEHTA GK
Citation
Hc. Barshilia et al., MICROSTRUCTURAL MODIFICATIONS IN DIAMOND-LIKE CARBON THIN-FILMS CAUSED BY HIGH-ENERGY ION IRRADIATION, Thin solid films, 258(1-2), 1995, pp. 123-127
Citations number
23
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
258
Issue
1-2
Year of publication
1995
Pages
123 - 127
Database
ISI
SICI code
0040-6090(1995)258:1-2<123:MMIDCT>2.0.ZU;2-D
Abstract
The effect of high energy (85 MeV) nickel ions on diamond-like carbon thin films, deposited by microwave discharge of acetylene and methane gases mixed with hydrogen, has been investigated. IR, Raman and spectr oscopic ellipsometry studies of irradiated and as-deposited films show large changes in their microstructural features. The effects of irrad iation on films prepared from acetylene-hydrogen and methane-hydrogen gas mixtures are very different. Such a behaviour is proposed to be du e to the microstructural variations in the as-deposited films.