Attenuation, scattering, and absorption coefficients of planar wavegui
des which contain light emitting areas are investigated by analysis of
the lateral intensity distribution of the light scattered out from re
gions of the waveguides surrounding the active areas. Short attenuatio
n lengths require an experimental method without the use of coupling p
risms. This method was succesfully applied to a set of thin film elect
roluminescent devices. Additionally, the outcoupling efficiency of the
devices was determined only using this optical method. i.e. independe
ntly of other efficiency measurements. It is shown that the separation
of scattering from absorption processes allows a quantitative analysi
s of the influence of the preparation conditions on the optical device
parameters.