Graphite surfaces cleaved perpendicular to the c axis have been irradi
ated with low doses of Ar+ ions at 50 eV kinetic energy and perpendicu
lar incidence. Scanning tunneling micrographs (STM) of these irradiate
d surfaces exhibited dome-like features as well as point defects. Thes
e dome-like features retain undisturbed graphite periodicity. This fin
ding is attributed to the stopping of ions between the first and secon
d graphite sheets. The possibility of doping semiconductors at extreme
ly shallow depths is raised.