OPTICAL AND STRUCTURAL-PROPERTIES OF SEMIINSULATING POLYCRYSTALLINE SILICON THIN-FILMS

Optical properties of semi-insulating polycrystalline silicon (SIPOS) thin films containing 30 at. % oxygen atoms are investigated in the ne ar ultraviolet, visible and infrared region to improve knowledge on th e structure and chemical bonding of these mixtures. An effective mediu m approximation model is used for a microscopic investigation of the o xide species involved as a function of the annealing temperature (600- 1200 degrees C). The results are compared with other optical spectrosc opies (infrared and Raman) and with transmission electron microscopy t o give a selected picture of the pure and oxide components