EVALUATION OF RESIDUAL DEFORMATIONS GENERATED BY A PULSED ION IMPLANTER USING INTERFEROMETRIC PHASE MEASUREMENT

A Fourier transform method of holographic fringe pattern analysis is a pplied to measure surface residual deformations generated by a pulsed ion implanter. The technique uses a fixture that makes it possible to remove the specimen and put it back into the same position after being implanted. The phase information from interferograms extracted by mea ns of the Fourier transform method is unwrapped using an algorithm bas ed on cellular automata. Results computed from the application of a nu merical model are compared with those determined experimentally and a reasonable agreement is obtained.