KELVIN PROBE FORCE MICROSCOPY FOR POTENTIAL DISTRIBUTION MEASUREMENT OF SEMICONDUCTOR-DEVICES

Authors
VATEL O TANIMOTO M
Citation
O. Vatel et M. Tanimoto, KELVIN PROBE FORCE MICROSCOPY FOR POTENTIAL DISTRIBUTION MEASUREMENT OF SEMICONDUCTOR-DEVICES, Journal of applied physics, 77(6), 1995, pp. 2358-2362
Citations number
10
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
77
Issue
6
Year of publication
1995
Pages
2358 - 2362
Database
ISI
SICI code
0021-8979(1995)77:6<2358:KPFMFP>2.0.ZU;2-6