CODIFFUSION OF ARSENIC AND BORON-IMPLANTED IN SILICON

Authors
SOLMI S VALMORRI S CANTERI R
Citation
S. Solmi et al., CODIFFUSION OF ARSENIC AND BORON-IMPLANTED IN SILICON, Journal of applied physics, 77(6), 1995, pp. 2400-2406
Citations number
23
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
77
Issue
6
Year of publication
1995
Pages
2400 - 2406
Database
ISI
SICI code
0021-8979(1995)77:6<2400:COAABI>2.0.ZU;2-V