COMBINED ELECTRON-SPIN-RESONANCE AND CAPACITANCE-VOLTAGE ANALYSIS OF HYDROGEN-ANNEALING INDUCED POSITIVE CHARGE IN BURIED SIO2

Authors
VANHEUSDEN K STESMANS A AFANASEV VV
Citation
K. Vanheusden et al., COMBINED ELECTRON-SPIN-RESONANCE AND CAPACITANCE-VOLTAGE ANALYSIS OF HYDROGEN-ANNEALING INDUCED POSITIVE CHARGE IN BURIED SIO2, Journal of applied physics, 77(6), 1995, pp. 2419-2424
Citations number
17
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
77
Issue
6
Year of publication
1995
Pages
2419 - 2424
Database
ISI
SICI code
0021-8979(1995)77:6<2419:CEACAO>2.0.ZU;2-Q