SIMULATION OF INFLUENCE OF PARTICLES ON PHOTORESIST FILMS FOR LITHOGRAPHY

Authors
KAMOSHIDA M INUI H OHTA T KASAMA K
Citation
M. Kamoshida et al., SIMULATION OF INFLUENCE OF PARTICLES ON PHOTORESIST FILMS FOR LITHOGRAPHY, Journal of applied physics, 77(6), 1995, pp. 2791-2795
Citations number
9
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
77
Issue
6
Year of publication
1995
Pages
2791 - 2795
Database
ISI
SICI code
0021-8979(1995)77:6<2791:SOIOPO>2.0.ZU;2-D