INFLUENCE OF A MATCHBOX ON RF DISCHARGES - A PIC-MC CASE-STUDY

We study the influence of a matchbox on the performance of an RF disch arge. As a case study we investigate a low-pressure asymmetric dischar ge using a PIC-MC code. We find that the presence of an inductivity in the matchbox smoothes the electron current in the discharge. As a con sequence, the electron temperature is raised and hence the ion density . The reason hereto lies in the fact that the inductivity damps out cu rrent peaks in the discharge.