SCANNING MICROELLIPSOMETRY FOR EXTRACTION OF TRUE TOPOGRAPHY

Authors
HOLMES RD SEE CW SOMEKH MG
Citation
Rd. Holmes et al., SCANNING MICROELLIPSOMETRY FOR EXTRACTION OF TRUE TOPOGRAPHY, Electronics Letters, 31(5), 1995, pp. 358-359
Citations number
7
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
31
Issue
5
Year of publication
1995
Pages
358 - 359
Database
ISI
SICI code
0013-5194(1995)31:5<358:SMFEOT>2.0.ZU;2-N
Abstract
The amplitude and phase distributions at the back focal plane of a sca nning interferometer are used to determine the phase of the optical re flection coefficient. This value for phase change is then fused to cor rect the overall phase measured with the interferometer, so that pure topography measurement is achieved.