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ITA
ENG
CHARGED-SPECIES PROFILES IN ELECTRONEGATIVE RADIOFREQUENCY PLASMAS
Authors
VENDER D
STOFFELS WW
STOFFELS E
KROESEN GMW
DEHOOG FJ
Citation
D. Vender et al., CHARGED-SPECIES PROFILES IN ELECTRONEGATIVE RADIOFREQUENCY PLASMAS, Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics, 51(3), 1995, pp. 2436-2444
Citations number
28
Categorie Soggetti
Physycs, Mathematical","Phsycs, Fluid & Plasmas
Journal title
Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics
→
ACNP
ISSN journal
1063651X
Volume
51
Issue
3
Year of publication
1995
Part
B
Pages
2436 - 2444
Database
ISI
SICI code
1063-651X(1995)51:3<2436:CPIERP>2.0.ZU;2-R