B. Bhushan et al., NANOINDENTATION, MICROSCRATCH, FRICTION AND WEAR STUDIES OF COATINGS FOR CONTACT RECORDING APPLICATIONS, Wear, 181, 1995, pp. 743-758
A nanoscale monolithic slider-suspension produced by photolithography
is used for contact recording. The contact pad consists of a multilaye
red structure consisting of SiC, amorphous hydrogenated carbon (a-C:H)
, Al2O3, Si, and Co-Nb-Zr films. In this study, we have compared hardn
ess, Young's modulus of elasticity, and scratch resistance or adhesion
of various coatings deposited on a single-crystal silicon wafer by na
noindentation and microscratch techniques and friction and wear perfor
mance by sliding against a diamond tip and sapphire ban in reciprocati
ng mode. SIC coatings exhibit the highest hardness, about 27 GPa, and
the highest elastic modulus, about 255 GPa. Microscratch data indicate
that SiC and a-C:H coating exhibit the highest resistance to scratchi
ng or debonding from the substrate. During scratching, an Al2O3 coatin
g deforms like a ductile metal rather than like a ceramic. Si and Co-N
b-Zr coatings exhibit ploughing of the tip into the sample surface and
debris generation right in the beginning of the scratch. SiC coatings
exhibit the best wear performance against a diamond tip as well as a
sapphire ball. For comparisons, we also made mechanical property measu
rements on bulk materials used in conventional recording: Ni-Zn ferrit
e, Al2O3-TiC, and SiC (under development). The bulk Ni-Zn ferrite samp
le was found to be damaged by grain pull-out during scratching even at
a low load of 3 mN. Bulk Al2O3-TiC exhibits unexpected ploughing of t
he sample right from the beginning of the scratch. Bulk SiC did not ex
hibit any signs of significant damage up to a normal load of about 15
mN. Overall comparison of mechanical properties of bulk materials and
coatings suggest that SiC is the most desirable coating in the contact
pad for low wear. An SiC coating is also recommended as an overcoat f
or thin film magnetic disks.