HIGH-RESOLUTION 3-D TOMOGRAPHY USING ION-BEAMS

Authors
CHOLEWA M LEGGE GJF SAINT A HOWARD J WHITEHOUSE D
Citation
M. Cholewa et al., HIGH-RESOLUTION 3-D TOMOGRAPHY USING ION-BEAMS, Annales de chimie, 19(5-6), 1994, pp. 245-256
Citations number
30
Categorie Soggetti
Chemistry,"Material Science
Journal title
Annales de chimie → ACNP
ISSN journal
01519107
Volume
19
Issue
5-6
Year of publication
1994
Pages
245 - 256
Database
ISI
SICI code
0151-9107(1994)19:5-6<245:H3TUI>2.0.ZU;2-S
Abstract
This paper describes three dimensional tomography of micron scale samp les using MeV ions. STIM (Scanning Transmission Ion Microscopy) Tomogr aphy enables density information from the sample to be obtained with 5 0 nm resolution. An associated method, PIXET (Particle Induced X-ray E mission Tomography) can produce three dimensional elemental maps of th e sample with resolution of the order of 1 mum.