APPLICATION OF WARM LANGMUIR PROBE IN THE PLASMA MEASUREMENTS INSIDE PLASMA-CHEMICAL REACTOR

In this report possibilities of application of warm Langmuir probe in the chemically active plasma are described. We present the results of some probe characteristic measurements obtained by means of cold and w arm tungsten and platinum probe. Various types of interaction of the p robe with plasma are discussed. All experiments have been performed in low-pressure glow DC discharge in argon contaminated with oil vapours . The measurements with both probes are compared with respect to their suitability for application in active low-pressure plasma.