HIGH-ENERGY HEAVY-ION IRRADIATION OF CHROMIUM FILMS

Citation
A. Jain et al., HIGH-ENERGY HEAVY-ION IRRADIATION OF CHROMIUM FILMS, Vacuum, 46(4), 1995, pp. 369-371
Citations number
5
Categorie Soggetti
Physics, Applied
Journal title
VacuumACNP
ISSN journal
0042207X
Volume
46
Issue
4
Year of publication
1995
Pages
369 - 371
Database
ISI
SICI code
0042-207X(1995)46:4<369:HHIOCF>2.0.ZU;2-9
Abstract
We have studied the modification of chromium coatings by nickel ion be ams at a high energy (75 MeV) so that the range of the ions is many ti mes the film thickness, which is of the order of 1 mu m. At this energ y, the rate of energy loss of ions is predicted to be fairly uniform o ver the entire thickness of the coating. The coating hardness increase s significantly, even at moderate doses. The effect is stronger when t he film deposition temperature is lower.