ETCHING OF SI(111)-(7X7) AND SI(100)-(2X1) SURFACES BY ATOMIC-HYDROGEN

Authors
WEI Y LI L TSONG IST
Citation
Y. Wei et al., ETCHING OF SI(111)-(7X7) AND SI(100)-(2X1) SURFACES BY ATOMIC-HYDROGEN, Applied physics letters, 66(14), 1995, pp. 1818-1820
Citations number
19
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
66
Issue
14
Year of publication
1995
Pages
1818 - 1820
Database
ISI
SICI code
0003-6951(1995)66:14<1818:EOSASS>2.0.ZU;2-E