THE INFLUENCE OF PRODUCTS OF COPPER ETCHING IN CHLORINE PLASMA ON ELECTRON-ENERGY DISTRIBUTION AND RATE COEFFICIENTS OF PROCESSES INVOLVINGELECTRONS

Authors
EFREMOV AM SVETTSOV VI MIKHALKIN VP
Citation
Am. Efremov et al., THE INFLUENCE OF PRODUCTS OF COPPER ETCHING IN CHLORINE PLASMA ON ELECTRON-ENERGY DISTRIBUTION AND RATE COEFFICIENTS OF PROCESSES INVOLVINGELECTRONS, High energy chemistry, 29(2), 1995, pp. 137-138
Citations number
6
Categorie Soggetti
Chemistry Physical
Journal title
High energy chemistry → ACNP
ISSN journal
00181439
Volume
29
Issue
2
Year of publication
1995
Pages
137 - 138
Database
ISI
SICI code
0018-1439(1995)29:2<137:TIOPOC>2.0.ZU;2-K