INFLUENCE OF FLUORINE IMPLANT ON BORON-DIFFUSION - DETERMINATION OF PROCESS MODELING PARAMETERS

Authors
VUONG HH GOSSMANN HJ RAFFERTY CS LUFTMAN HS UNTERWALD FC JACOBSON DC AHRENS RE BOONE T ZEITZOFF PM
Citation
Hh. Vuong et al., INFLUENCE OF FLUORINE IMPLANT ON BORON-DIFFUSION - DETERMINATION OF PROCESS MODELING PARAMETERS, Journal of applied physics, 77(7), 1995, pp. 3056-3060
Citations number
30
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
77
Issue
7
Year of publication
1995
Pages
3056 - 3060
Database
ISI
SICI code
0021-8979(1995)77:7<3056:IOFIOB>2.0.ZU;2-I