KR INCORPORATION IN SPUTTERED AMORPHOUS SI LAYERS

Citation
Mjw. Greuter et al., KR INCORPORATION IN SPUTTERED AMORPHOUS SI LAYERS, Journal of applied physics, 77(7), 1995, pp. 3467-3478
Citations number
49
Categorie Soggetti
Physics, Applied
Journal title
ISSN journal
00218979
Volume
77
Issue
7
Year of publication
1995
Pages
3467 - 3478
Database
ISI
SICI code
0021-8979(1995)77:7<3467:KIISAS>2.0.ZU;2-U