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ITA
ENG
KR INCORPORATION IN SPUTTERED AMORPHOUS SI LAYERS
Authors
GREUTER MJW
NIESEN L
VANVEEN A
HAKVOORT RA
VERWERFT M
DEHOSSON JTM
BERNTSEN AJM
SLOOF WG
Citation
Mjw. Greuter et al., KR INCORPORATION IN SPUTTERED AMORPHOUS SI LAYERS, Journal of applied physics, 77(7), 1995, pp. 3467-3478
Citations number
49
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics
→
ACNP
ISSN journal
00218979
Volume
77
Issue
7
Year of publication
1995
Pages
3467 - 3478
Database
ISI
SICI code
0021-8979(1995)77:7<3467:KIISAS>2.0.ZU;2-U