L. Dobaczewski et al., THE USE OF GA2SE3 AND GA2S3 AS DONOR DOPING SOURCES FOR MBE-GROWN ALXGA1-XSB AND ALXGA1-XAS, Semiconductor science and technology, 10(4), 1995, pp. 509-514
The first results obtained with a use of Ga2S3 and Ga2Se3 compounds as
sources of donor elements for the molecular beam epitaxy of AlxGa1-xS
b (0 less than or equal to x less than or equal to 1) on GaSb and GaAs
substrates and AlxGa1-xAs (0 less than or equal to x less than or equ
al to 0.4) are reported. In GaAs, free electron concentrations obtaine
d when incorporating the donors from these sources can be easily contr
olled up to a maximum of 5 x 10(18) cm(-3). For AlxGa1-xSb it was poss
ible to compensate the high concentration of native accepters and obta
in n-type of conductivity over the full composition range of the alloy
. For GaSb maximum free electron concentrations were 6 x 10(17) cm(-3)
and 5 x 10(16) cm(-3) for selenium and sulphur elements respectively.