DETERMINATION OF SURFACE PROFILE STATISTICS FROM ELECTROMAGNETIC SCATTERING DATA

Citation
V. Malyshkin et al., DETERMINATION OF SURFACE PROFILE STATISTICS FROM ELECTROMAGNETIC SCATTERING DATA, Optics letters, 22(1), 1997, pp. 58-60
Citations number
13
Categorie Soggetti
Optics
Journal title
ISSN journal
01469592
Volume
22
Issue
1
Year of publication
1997
Pages
58 - 60
Database
ISI
SICI code
0146-9592(1997)22:1<58:DOSPSF>2.0.ZU;2-Y
Abstract
A new reverse Monte Carlo method for the determination of the surface profile statistics from differential reflection data for the scatterin g of electromagnetic radiation from rough surfaces is presented. The m ethod is used to extract the power spectrum of the surface profile fro m scattering data recently measured by West and O'Donnell [J. Opt. Sec . Am. A 12, 390 (1995)]. Excellent agreement with the power spectrum o f the surface profile measured by contact profilometry is obtained. (C ) 1997 Optical Society of America