Bearing in mind the problems of finding a lattice-matched substrate fo
r the grow-th of binary group III nitride films and the detrimental ef
fect of the large activation energy associated with acceptors in GaN,
we propose the study of the alloy system AlGaAsN. We predict that it m
ay be possible to obtain a direct gap alloy, with a band gap as wide a
s 2.8eV, which is lattice-matched to silicon substrates. The paper rep
orts our attempts to grow GaAsN alloy films by molecular beam epitaxy
on either GaAs or GaP substrates, using a radio frequency plasma sourc
e to supply active nitrogen. Auger electron spectra demonstrate that i
t is possible to incorporate several tens of percent of nitrogen into
GaAs films, though x-ray diffraction measurements show that such films
contain mixed binary phases rather than true alloys. An interesting o
bservation concerns the fact that it is possible to control the crysta
l structure of GaN films by the application of an As flux during growt
h. In films grown at 620 degrees C a high As flux tends to increase th
e proportion of cubic GaN while also resulting in the incorporation of
GaAs. Films grown at 700 degrees C show no evidence for GaAs incorpor
ation; at this temperature, it is possible to grow either purely cubic
or purely hexagonal GaN depending on the presence or absence of the A
s beam.