REENTRANT LAYER-BY-LAYER ETCHING OF GAAS(001)

Authors
KANEKO T SMILAUER P JOYCE BA
Citation
T. Kaneko et al., REENTRANT LAYER-BY-LAYER ETCHING OF GAAS(001), Physical review letters, 74(16), 1995, pp. 3289-3292
Citations number
24
Categorie Soggetti
Physics
Journal title
Physical review letters → ACNP
ISSN journal
00319007
Volume
74
Issue
16
Year of publication
1995
Pages
3289 - 3292
Database
ISI
SICI code
0031-9007(1995)74:16<3289:RLEOG>2.0.ZU;2-O