GAAS MQW MODULATORS INTEGRATED WITH SILICON CMOS

Authors
GOOSSEN KW WALKER JA DASARO LA HUI SP TSENG B LEIBENGUTH R KOSSIVES D BACON DD DAHRINGER D CHIROVSKY LMF LENTINE AL MILLER DAB
Citation
Kw. Goossen et al., GAAS MQW MODULATORS INTEGRATED WITH SILICON CMOS, IEEE photonics technology letters, 7(4), 1995, pp. 360-362
Citations number
9
Categorie Soggetti
Optics,"Physics, Applied
Journal title
IEEE photonics technology letters → ACNP
ISSN journal
10411135
Volume
7
Issue
4
Year of publication
1995
Pages
360 - 362
Database
ISI
SICI code
1041-1135(1995)7:4<360:GMMIWS>2.0.ZU;2-C
Abstract
We demonstrate integration of GaAs-AlGaAs multiple quantum well modula tors to silicon CMOS circuitry via flip-chip solder-bonding followed b y substrate removal. We obtain 95% device yield for 32 x 32 arrays of devices with 15 micron solder pads. We show operation of a simple circ uit composed of a modulator and a CMOS transistor.