DEPOSITION OF INORGANIC SALTS FROM SOLUTION ON FLAT SUBSTRATES BY SPIN-COATING - THEORY, QUANTIFICATION AND APPLICATION TO MODEL CATALYSTS

Citation
Rm. Vanhardeveld et al., DEPOSITION OF INORGANIC SALTS FROM SOLUTION ON FLAT SUBSTRATES BY SPIN-COATING - THEORY, QUANTIFICATION AND APPLICATION TO MODEL CATALYSTS, Applied surface science, 84(4), 1995, pp. 339-346
Citations number
25
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical","Materials Science, Coatings & Films
Journal title
ISSN journal
01694332
Volume
84
Issue
4
Year of publication
1995
Pages
339 - 346
Database
ISI
SICI code
0169-4332(1995)84:4<339:DOISFS>2.0.ZU;2-J
Abstract
The theory of spin-coating is applied to predict the amount of inorgan ic material that is deposited from a solution on a flat substrate on t he basis of concentration, density, viscosity and evaporation rate of the solution and the spin speed applied during spin-coating. Measureme nts by Rutherford backscattering spectrometry (RBS) and inductively co upled plasma optical emission spectroscopy (ICP-OES) confirm the valid ity of the theory. Applications of the method in the preparation of mo del catalysts are discussed.