WHITE-LIGHT SCANNING FIBER MICHELSON INTERFEROMETER FOR ABSOLUTE POSITION-DISTANCE MEASUREMENT

A white-light fiber interferometer working in the spatial domain, usin g two fiber ends in a hollow tube as the sensing head and an electric magnetic actuator-mirror reflector as the path-compensation-measuremen t element, is presented. Analysis and preliminary experiments have dem onstrated a repeatability of 0.5 mu m (2 sigma) for position-distance measurement, and the measurement uncertainty was estimated to be 1.5 m u m (2 sigma) over a distance range of 150 mu m. Suggestions for furth er improving the measurement accuracy and response speed are also give n.