CONDUCTING ORGANIC THIN-FILMS BY ION-ASSISTED EVAPORATION AND THEIR APPLICATION TO ELECTRONIC DEVICES AND COMPONENTS

In order to obtain the high-quality thin films, we have proposed an io n-beam-assisted deposition of organic materials using a low energy ion source. The capacitor with organic conductive thin films as solid ele ctrolyte and the electoluminescent (EL) diode with a single- or double -layer structure of organic thin films were prepared by ion-beam-assis ted method. The solid electrolytic capacitor with a large capacitance per unit area and a good frequency response was obtained by using evap orated films. Also, the EL diodes have been constructed by means of ev aporation under ion beam irradiation, the light emission intensity str ongly increased compared with the thermal deposition method.