J. Kyokane et al., CONDUCTING ORGANIC THIN-FILMS BY ION-ASSISTED EVAPORATION AND THEIR APPLICATION TO ELECTRONIC DEVICES AND COMPONENTS, Synthetic metals, 71(1-3), 1995, pp. 2219-2220
In order to obtain the high-quality thin films, we have proposed an io
n-beam-assisted deposition of organic materials using a low energy ion
source. The capacitor with organic conductive thin films as solid ele
ctrolyte and the electoluminescent (EL) diode with a single- or double
-layer structure of organic thin films were prepared by ion-beam-assis
ted method. The solid electrolytic capacitor with a large capacitance
per unit area and a good frequency response was obtained by using evap
orated films. Also, the EL diodes have been constructed by means of ev
aporation under ion beam irradiation, the light emission intensity str
ongly increased compared with the thermal deposition method.