ION-PLASMA SPUTTERING AS A METHOD OF INTRODUCING SOLID MATERIAL INTO AN ELECTRON-CYCLOTRON-RESONANCE ION-SOURCE

Authors
HARKEWICZ R BILLQUIST PJ GREENE JP NOLEN JA PARDO RC
Citation
R. Harkewicz et al., ION-PLASMA SPUTTERING AS A METHOD OF INTRODUCING SOLID MATERIAL INTO AN ELECTRON-CYCLOTRON-RESONANCE ION-SOURCE, Review of scientific instruments, 66(4), 1995, pp. 2883-2887
Citations number
8
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
Journal title
Review of scientific instruments → ACNP
ISSN journal
00346748
Volume
66
Issue
4
Year of publication
1995
Pages
2883 - 2887
Database
ISI
SICI code
0034-6748(1995)66:4<2883:ISAAMO>2.0.ZU;2-8