AUTOMATED POLARIMETER-MACROSCOPE FOR OPTICAL MAPPING OF BIREFRINGENCE, AZIMUTHS, AND TRANSMISSION IN LARGE-AREA WAFERS .1. THEORY OF THE MEASUREMENT

Authors
BAJOR AL
Citation
Al. Bajor, AUTOMATED POLARIMETER-MACROSCOPE FOR OPTICAL MAPPING OF BIREFRINGENCE, AZIMUTHS, AND TRANSMISSION IN LARGE-AREA WAFERS .1. THEORY OF THE MEASUREMENT, Review of scientific instruments, 66(4), 1995, pp. 2977-2990
Citations number
36
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
Journal title
Review of scientific instruments → ACNP
ISSN journal
00346748
Volume
66
Issue
4
Year of publication
1995
Pages
2977 - 2990
Database
ISI
SICI code
0034-6748(1995)66:4<2977:APFOMO>2.0.ZU;2-D