POLARIZATIONAL REFLECTOMETERS FOR REALIZATION OF THE METHOD OF COMBINED ELLIPSOMETRIC PARAMETERS

Authors
DROZD PI POPERENKO LV PROROK VV SHAYKEVICH IA
Citation
Pi. Drozd et al., POLARIZATIONAL REFLECTOMETERS FOR REALIZATION OF THE METHOD OF COMBINED ELLIPSOMETRIC PARAMETERS, Optical engineering, 34(4), 1995, pp. 1013-1015
Citations number
2
Categorie Soggetti
Optics
Journal title
Optical engineering → ACNP
ISSN journal
00913286
Volume
34
Issue
4
Year of publication
1995
Pages
1013 - 1015
Database
ISI
SICI code
0091-3286(1995)34:4<1013:PRFROT>2.0.ZU;2-E
Abstract
The construction of two novel double-beam polarizational devices for t he realization of the combined ellipsometric parameter method for soli ds and for liquids is described. As an example, the results of measure ments based on this method for nonoxidic and oxidic surfaces of copper are presented.