FREE STANDING SINGLE-CRYSTAL SILICON MICROSTRUCTURES

Micromachined structures of single-crystal silicon have been fabricate d with a view to developing them for a number of potential uses. The s tructures which are fabricated in (111) orientation silicon are undope d thus permitting the incorporation of active circuit elements in the structures themselves, Moreover no high temperatures, applied voltages or long etch times are used in the fabrication sequence, thereby simp lifying the task of integration with circuit processes. The potential uses of these structures include photodiodes with high speed and effic iency, accelerometers, or structures for stress or thermal isolation.