DESIGN AND FABRICATION PROCESS FOR ELECTROSTATIC SIDE-DRIVE MOTORS

Authors
FRANGOUL AG SUNDARAM KB
Citation
Ag. Frangoul et Kb. Sundaram, DESIGN AND FABRICATION PROCESS FOR ELECTROSTATIC SIDE-DRIVE MOTORS, Journal of micromechanics and microengineering, 5(1), 1995, pp. 11-17
Citations number
10
Categorie Soggetti
Engineering, Eletrical & Electronic","Engineering, Mechanical
Journal title
Journal of micromechanics and microengineering → ACNP
ISSN journal
09601317
Volume
5
Issue
1
Year of publication
1995
Pages
11 - 17
Database
ISI
SICI code
0960-1317(1995)5:1<11:DAFPFE>2.0.ZU;2-7
Abstract
A new process technique has been implemented for the fabrication of el ectrostatic side-drive micromotors. In the present technique, polyimid e has been used as the hub material for fabricating the 4-pole rotor, 8-pole rotor and the wobble micromotors. Process techniques to achieve the micromachining of these structures are discussed in detail.