FORMATION OF HIGHLY TETRAHEDRAL AMORPHOUS HYDROGENATED CARBON, TA-C-H

Citation
M. Weiler et al., FORMATION OF HIGHLY TETRAHEDRAL AMORPHOUS HYDROGENATED CARBON, TA-C-H, DIAMOND AND RELATED MATERIALS, 4(4), 1995, pp. 268-271
Citations number
28
Categorie Soggetti
Material Science
ISSN journal
09259635
Volume
4
Issue
4
Year of publication
1995
Pages
268 - 271
Database
ISI
SICI code
0925-9635(1995)4:4<268:FOHTAH>2.0.ZU;2-3
Abstract
A highly tetrahedral form of hydrogenated amorphous carbon (ta-C:H) wi th maximum density of 2.9 g cm(-3), sp(3) fraction of 0.75 and hardnes s of 61 GPa has been deposited from acetylene using a low pressure pla sma beam source. The ion energy dependence of its properties suggests that the subplantation deposition model of a-C also describes the depo sition of a-C:H.