PHOTOABLATION OF A GRAPHITE TARGET BY A KRF LASER-BEAM - REALIZATION OF HARD CARBON THIN-FILMS

Authors
GERMAIN C GIRAULT C AUBRETON J CATHERINOT A BEC S TONCK A
Citation
C. Germain et al., PHOTOABLATION OF A GRAPHITE TARGET BY A KRF LASER-BEAM - REALIZATION OF HARD CARBON THIN-FILMS, DIAMOND AND RELATED MATERIALS, 4(4), 1995, pp. 309-313
Citations number
11
Categorie Soggetti
Material Science
Journal title
DIAMOND AND RELATED MATERIALS → ACNP
ISSN journal
09259635
Volume
4
Issue
4
Year of publication
1995
Pages
309 - 313
Database
ISI
SICI code
0925-9635(1995)4:4<309:POAGTB>2.0.ZU;2-H
Abstract
Results concerning the analysis by time and spatially resolved emissio n spectroscopy and charged particles detection of the plasma plume cre ated during the interaction between a KrF laser beam and a graphite ta rget are given. Measurements lead to the formulation of an hypothesis about the structure of the plume. Then, hard carbon thin films are rea lized on different substrates. They have properties close to those of diamond (hardness = 80 GPa, infrared transparency >90%) when the depos ition temperature is low (< 100 degrees C).