PREDICTION OF THE FEASIBILITY OF ORIENTED DIAMOND FILMS BY MICROWAVE PLASMA-ASSISTED CVD

After the nucleation step, the fabrication of textured or heteroepitax ial diamond film depends strongly on the direction of the fastest grow th (vector denoted d(v max)) associated with every diamond particle. F rom quantification of this vector for single-crystal and multiply twin ned particles (MTPs), we can determine the relative feasibility of tex tured or heteroepitaxial films in relation to preparation conditions s uch as the hydrocarbon concentration or substrate temperature. This th eoretical study, that takes account of the results of morphological an d structural characterizations of textured diamond films, reveals the difficulty of producing [111] textured films that lead to [011] textur ed films, and the ease of obtaining [001] textured films.