S. Barrat et E. Bauergrosse, PREDICTION OF THE FEASIBILITY OF ORIENTED DIAMOND FILMS BY MICROWAVE PLASMA-ASSISTED CVD, DIAMOND AND RELATED MATERIALS, 4(4), 1995, pp. 419-424
After the nucleation step, the fabrication of textured or heteroepitax
ial diamond film depends strongly on the direction of the fastest grow
th (vector denoted d(v max)) associated with every diamond particle. F
rom quantification of this vector for single-crystal and multiply twin
ned particles (MTPs), we can determine the relative feasibility of tex
tured or heteroepitaxial films in relation to preparation conditions s
uch as the hydrocarbon concentration or substrate temperature. This th
eoretical study, that takes account of the results of morphological an
d structural characterizations of textured diamond films, reveals the
difficulty of producing [111] textured films that lead to [011] textur
ed films, and the ease of obtaining [001] textured films.